Internal Reflection Elements with a wide spectral window

Our thin microgrooved wafers have a short path length through Si compared to larger ATR elements. This widens the usable spectral window by minimizing phonon absorption. Microgrooved wafers are well suited to physical vapour deposition as multiple substrates may be coated simultaneously.

55 degree wafers (aka “ATR-SEIRAS optimized” wafers) are best used for metal films deposited directly on the wafer (see application note for details).

35 degree wafers (aka “Universal” wafers) are recommended for hybrid ITO/metal films.

The groove angle is defined with respect to the principal reflecting plane, the same as the face angle in a face-angled crystal. The external dimensions of the microgrooved wafers are 9 × 11 mm.